Manual wafer probe station summary

                                                            Probe station series attributes:

  

Probe station series Wafer chuck Micropositioner deck (platen) Microscope XY stage included?
PEH

X-Y movement sized to wafer diameter. Fine z-axis adjust.

Fixed position  No
EB

 X-Y movement sized to wafer diameter. Fine z-axis adjust.

Fixed position  Yes
BD

X-Y movement sized to wafer diameter. Larger X-Y controls. Chuck also slides along y-axis for wafer removal.

1) Z-axis fine movement.

2) Lever raises platen for wafer removal.

 Yes

Lever added to tilt back, lift up, microscope.

 

                                  PE series substitutes platen bars for PEH micropositioner deck.

 

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