EB-4 wafer probe station base

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50.0 LBS
Calculated at Checkout
EB-4 wafer probe station base

Specifications for base configuration: 

  • 4" vacuum chuck
  • Movable chuck stage:
    • 4" x 4" linear XY travel
    • Chuck Z adjustment: +/- 4mm
  • Micropositioner deck capacity: 12 micropositioners
  • Heavy duty microscope stage, 1" x 1" X-Y travel
    • Microscope stage accomodates heavier microscope with less vibration
  • Upgradable to 6" in the field
FOR ONE YEAR from the date of shipment, this product is warranted against any defects in material or workmanship. With proof of purchase, a defective product will be replaced/repaired free of charge. This warranty does not cover expendable parts that can wear out from normal use within the warranty period.