Specifications for base configuration:
- Accommodates 12" wafer
- Vacuum chuck: 12" diameter stainless steel
- switch between vacuum ports positioned to handle small, medium and 12 inch diameter wafers
- Precision Z axis micropositioner deck movement
- Chuck stage:
- 12" x 12" XY travel
- Micropositioner deck fine z movement: +/- 12.5mm
- Micropositioner deck 6mm gross z movement (lever) for loading/unloading
- Micropositioner deck capacity: 12 micropositioners
- Microscope stage X-Y travel: 1" x 1"
- Microscope tilt back lever
- RF probing field upgradable.
- (microscope for display)
Deliver time: 4-8 weeks
FOR ONE YEAR from the date of shipment, this product is warranted against any defects in material or workmanship. With proof of purchase, a defective product will be replaced/repaired free of charge. This warranty does not cover expendable parts that can wear out from normal use within the warranty period.